Broad angular multilayer analyzer for soft x-rays

TY - JOUR

T1 - Broad angular multilayer analyzer for soft x-rays

AU - Wang, Z S

AU - Wang, H C

AU - Zhu, J T

AU - Wang, F L

AU - Gu, Z X

AU - Chen, L Y

AU - Michette, A G

AU - Powell, A K

AU - Pfauntsch, S J

AU - Schafers, F

PY - 2006/3

Y1 - 2006/3

N2 - Using numerical optimization algorithm, non-periodic Mo/Si, Mo/Be, and Ni/C broad angular multilayer analyzers have been designed. At the wavelength of 13 nm and the angular range of 45 similar to 49 degrees, the Mo/Si and Mo/Be multilayer can provide the plateau s-reflectivity of 65% and 45%, respectively. At 5.7 nm, the s-reflectivity of Ni/C multilayer is 16% in the 44 similar to 46 degrees range. The non-periodic Mo/Si broad angular multilayer was also fabricated using DC magnetron sputtering, and characterized using the soft X-ray polarimeter at BESSY. The s-reflectivity is higher than 45.6% over the angular range of 45 similar to 49 degrees at 13 nm, where, the degree of polarization is more than 99.98%. (c) 2006 Optical Society of American

AB - Using numerical optimization algorithm, non-periodic Mo/Si, Mo/Be, and Ni/C broad angular multilayer analyzers have been designed. At the wavelength of 13 nm and the angular range of 45 similar to 49 degrees, the Mo/Si and Mo/Be multilayer can provide the plateau s-reflectivity of 65% and 45%, respectively. At 5.7 nm, the s-reflectivity of Ni/C multilayer is 16% in the 44 similar to 46 degrees range. The non-periodic Mo/Si broad angular multilayer was also fabricated using DC magnetron sputtering, and characterized using the soft X-ray polarimeter at BESSY. The s-reflectivity is higher than 45.6% over the angular range of 45 similar to 49 degrees at 13 nm, where, the degree of polarization is more than 99.98%. (c) 2006 Optical Society of American

U2 - 10.1364/OE.14.002533

DO - 10.1364/OE.14.002533

M3 - Article

VL - 14

SP - 2533

EP - 2538

JO - OPTICS EXPRESS

JF - OPTICS EXPRESS

IS - 6

ER -