Broadband Mo/Si multilayer analyzers for the 15-17 nm wavelength range

H C Wang; J T Zhu; Z S Wang; Z Zhang; S M Zhang; W J Wu; L Y Chen; A G Michette; A K Powell; S J Pfauntsch; F Schafers; A Gaupp

doi:10.1016/j.tsf.2006.04.039

Broadband Mo/Si multilayer analyzers for the 15-17 nm wavelength range

H C Wang, J T Zhu, Z S Wang, Z Zhang, S M Zhang, W J Wu, L Y Chen, A G Michette, A K Powell, S J Pfauntsch, F Schafers, A Gaupp

Physics

Research output: Contribution to journal › Article › peer-review

23 Citations (Scopus)

Abstract

Aperiodic molybdenum/silicon broadband multilayer analyzers with constant reflectivity over a wide spectral range for a fixed incidence angle have been designed using a combined analytical/numerical method. The analyzers were fabricated using direct current magnetron sputtering and characterized using the soft X-ray polarimeter at the BESSY facility. Nearly constant s-reflectivity, up to 37%, is observed over the 15-17 nm wavelength range at a grazing incidence angle of 50 degrees, and the degree of polarization is over 98%. Furthermore, the analyzer also exhibits high s-reflectivity and polarization over a broad angular range, 43-53 degrees, at a fixed wavelength of 15.5 m. This kind of broadband multilayer analyzer can be used in extreme ultraviolet polarization measurements, and will greatly simplify experimental arrangements. (c) 2006 Elsevier B.V All rights reserved

Original language	English
Pages (from-to)	2523 - 2526
Number of pages	4
Journal	THIN SOLID FILMS
Volume	515
Issue number	4
DOIs	https://doi.org/10.1016/j.tsf.2006.04.039
Publication status	Published - 5 Dec 2006

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10.1016/j.tsf.2006.04.039

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title = "Broadband Mo/Si multilayer analyzers for the 15-17 nm wavelength range",

abstract = "Aperiodic molybdenum/silicon broadband multilayer analyzers with constant reflectivity over a wide spectral range for a fixed incidence angle have been designed using a combined analytical/numerical method. The analyzers were fabricated using direct current magnetron sputtering and characterized using the soft X-ray polarimeter at the BESSY facility. Nearly constant s-reflectivity, up to 37%, is observed over the 15-17 nm wavelength range at a grazing incidence angle of 50 degrees, and the degree of polarization is over 98%. Furthermore, the analyzer also exhibits high s-reflectivity and polarization over a broad angular range, 43-53 degrees, at a fixed wavelength of 15.5 m. This kind of broadband multilayer analyzer can be used in extreme ultraviolet polarization measurements, and will greatly simplify experimental arrangements. (c) 2006 Elsevier B.V All rights reserved",

author = "Wang, {H C} and Zhu, {J T} and Wang, {Z S} and Z Zhang and Zhang, {S M} and Wu, {W J} and Chen, {L Y} and Michette, {A G} and Powell, {A K} and Pfauntsch, {S J} and F Schafers and A Gaupp",

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language = "English",

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T1 - Broadband Mo/Si multilayer analyzers for the 15-17 nm wavelength range

AU - Wang, H C

AU - Zhu, J T

AU - Wang, Z S

AU - Zhang, Z

AU - Zhang, S M

AU - Wu, W J

AU - Chen, L Y

AU - Michette, A G

AU - Powell, A K

AU - Pfauntsch, S J

AU - Schafers, F

AU - Gaupp, A

PY - 2006/12/5

Y1 - 2006/12/5

N2 - Aperiodic molybdenum/silicon broadband multilayer analyzers with constant reflectivity over a wide spectral range for a fixed incidence angle have been designed using a combined analytical/numerical method. The analyzers were fabricated using direct current magnetron sputtering and characterized using the soft X-ray polarimeter at the BESSY facility. Nearly constant s-reflectivity, up to 37%, is observed over the 15-17 nm wavelength range at a grazing incidence angle of 50 degrees, and the degree of polarization is over 98%. Furthermore, the analyzer also exhibits high s-reflectivity and polarization over a broad angular range, 43-53 degrees, at a fixed wavelength of 15.5 m. This kind of broadband multilayer analyzer can be used in extreme ultraviolet polarization measurements, and will greatly simplify experimental arrangements. (c) 2006 Elsevier B.V All rights reserved

AB - Aperiodic molybdenum/silicon broadband multilayer analyzers with constant reflectivity over a wide spectral range for a fixed incidence angle have been designed using a combined analytical/numerical method. The analyzers were fabricated using direct current magnetron sputtering and characterized using the soft X-ray polarimeter at the BESSY facility. Nearly constant s-reflectivity, up to 37%, is observed over the 15-17 nm wavelength range at a grazing incidence angle of 50 degrees, and the degree of polarization is over 98%. Furthermore, the analyzer also exhibits high s-reflectivity and polarization over a broad angular range, 43-53 degrees, at a fixed wavelength of 15.5 m. This kind of broadband multilayer analyzer can be used in extreme ultraviolet polarization measurements, and will greatly simplify experimental arrangements. (c) 2006 Elsevier B.V All rights reserved

U2 - 10.1016/j.tsf.2006.04.039

DO - 10.1016/j.tsf.2006.04.039

M3 - Article

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EP - 2526

JO - THIN SOLID FILMS

JF - THIN SOLID FILMS

IS - 4

ER -

Broadband Mo/Si multilayer analyzers for the 15-17 nm wavelength range

Abstract

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