Broadband multilayer polarizers for the extreme ultraviolet

Z S Wang; H C Wang; J T Zhu; F L Wang; Z X Gu; L Y Chen; A G Michette; A K Powell; S J Pfauntsch; F Schafers

doi:10.1063/1.2179152

Broadband multilayer polarizers for the extreme ultraviolet

Z S Wang, H C Wang, J T Zhu, F L Wang, Z X Gu, L Y Chen, A G Michette, A K Powell, S J Pfauntsch, F Schafers

Physics

Research output: Contribution to journal › Article › peer-review

36 Citations (Scopus)

Abstract

Nonperiodic molybdenum/silicon broadband multilayer polarizers have been designed using numerical optimization algorithm and fabricated using direct current magnetron sputtering. Their performances have been characterized using the high precision eight-axis soft x-ray polarimeter at the BESSY facility. Different multilayers have measured s-polarized reflectivities of 27% at 13.1 nm and higher than 15% over the wavelength range of 13-19 nm. Nearly constant s reflectivity, up to 37%, is observed over the 15-17 nm wavelength range, where the degree of polarization is more than 98%. Furthermore, these multilayer polarizers also show high s reflectivity and polarization over a broad angular range at fixed wavelength. (c) 2006 American Institute of Physics

Original language	English
Article number	056108
Journal	Journal of Applied Physics
Volume	99
Issue number	5
DOIs	https://doi.org/10.1063/1.2179152
Publication status	Published - 1 Mar 2006

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title = "Broadband multilayer polarizers for the extreme ultraviolet",

abstract = "Nonperiodic molybdenum/silicon broadband multilayer polarizers have been designed using numerical optimization algorithm and fabricated using direct current magnetron sputtering. Their performances have been characterized using the high precision eight-axis soft x-ray polarimeter at the BESSY facility. Different multilayers have measured s-polarized reflectivities of 27% at 13.1 nm and higher than 15% over the wavelength range of 13-19 nm. Nearly constant s reflectivity, up to 37%, is observed over the 15-17 nm wavelength range, where the degree of polarization is more than 98%. Furthermore, these multilayer polarizers also show high s reflectivity and polarization over a broad angular range at fixed wavelength. (c) 2006 American Institute of Physics",

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T1 - Broadband multilayer polarizers for the extreme ultraviolet

AU - Wang, Z S

AU - Wang, H C

AU - Zhu, J T

AU - Wang, F L

AU - Gu, Z X

AU - Chen, L Y

AU - Michette, A G

AU - Powell, A K

AU - Pfauntsch, S J

AU - Schafers, F

PY - 2006/3/1

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N2 - Nonperiodic molybdenum/silicon broadband multilayer polarizers have been designed using numerical optimization algorithm and fabricated using direct current magnetron sputtering. Their performances have been characterized using the high precision eight-axis soft x-ray polarimeter at the BESSY facility. Different multilayers have measured s-polarized reflectivities of 27% at 13.1 nm and higher than 15% over the wavelength range of 13-19 nm. Nearly constant s reflectivity, up to 37%, is observed over the 15-17 nm wavelength range, where the degree of polarization is more than 98%. Furthermore, these multilayer polarizers also show high s reflectivity and polarization over a broad angular range at fixed wavelength. (c) 2006 American Institute of Physics

AB - Nonperiodic molybdenum/silicon broadband multilayer polarizers have been designed using numerical optimization algorithm and fabricated using direct current magnetron sputtering. Their performances have been characterized using the high precision eight-axis soft x-ray polarimeter at the BESSY facility. Different multilayers have measured s-polarized reflectivities of 27% at 13.1 nm and higher than 15% over the wavelength range of 13-19 nm. Nearly constant s reflectivity, up to 37%, is observed over the 15-17 nm wavelength range, where the degree of polarization is more than 98%. Furthermore, these multilayer polarizers also show high s reflectivity and polarization over a broad angular range at fixed wavelength. (c) 2006 American Institute of Physics

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DO - 10.1063/1.2179152

M3 - Article

SN - 1089-7550

VL - 99

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 5

M1 - 056108

ER -

Broadband multilayer polarizers for the extreme ultraviolet

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