Design, fabrication, and characterization of broadband multilayer mirrors for EUV optics at normal incidence

Z Wang, C J Kun, Y Y Ma, B Chen, J L Cao, Z Y Zhou, X D Chen, Alan Michette

Research output: Chapter in Book/Report/Conference proceedingConference paper

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProc SPIE
PublisherUnknown Publisher
Publication statusPublished - 2000

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