Extreme ultraviolet broadband Mo/Y multilayer analyzers

TY - JOUR

T1 - Extreme ultraviolet broadband Mo/Y multilayer analyzers

AU - Wang, Zhanshan

AU - Wang, Hongchang

AU - Schaefers, Franz

AU - Xu, Yao

AU - Li, Cunxia

AU - Wang, Fengli

AU - Zhang, Zhong

AU - Wu, Yongrong

AU - Cheng, Xinbin

AU - Chen, Lingyan

AU - Michette, Alan

AU - Pfauntsch, Slawka

AU - Powell, Keith

AU - Zhu, Jingtao

AU - Gaupp, Andreas

AU - MacDonald, Mike

PY - 2006

Y1 - 2006

N2 - Broadband extreme ultraviolet molybdenum/yttrium aperiodic multilayer analyzers were designed for polarization experiments in 8.5–11.7 nm wavelength range. The multilayer analyzers were made using direct current magnetron sputtering and characterized using the soft x-ray polarimeter at BESSY-II facility. Measured s reflectivities at the Brewster angle are 5.5% for a multilayer designed for 8.5–10.1 nm wavelength range and 6.1% for one designed for 9.1–11.7 nm. The multilayers also exhibit high polarization degree up to 98.79%. In addition, the multilayer was also measured over 38°–52° angular range at the fixed wavelength of 10.2 nm and the mean s reflectivity is 6.2%.

AB - Broadband extreme ultraviolet molybdenum/yttrium aperiodic multilayer analyzers were designed for polarization experiments in 8.5–11.7 nm wavelength range. The multilayer analyzers were made using direct current magnetron sputtering and characterized using the soft x-ray polarimeter at BESSY-II facility. Measured s reflectivities at the Brewster angle are 5.5% for a multilayer designed for 8.5–10.1 nm wavelength range and 6.1% for one designed for 9.1–11.7 nm. The multilayers also exhibit high polarization degree up to 98.79%. In addition, the multilayer was also measured over 38°–52° angular range at the fixed wavelength of 10.2 nm and the mean s reflectivity is 6.2%.

U2 - 10.1063/1.2405874

DO - 10.1063/1.2405874

M3 - Article

VL - 89

JO - APPLIED PHYSICS LETTERS

JF - APPLIED PHYSICS LETTERS

IS - 24

M1 - 241120

ER -