Investigation of process latitude in e-beam lithography for positive CAR UVIII using novel volumetric linewidth measurement

V Kudryashov, P Prewett, A Michette

Research output: Chapter in Book/Report/Conference proceedingConference paper

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProc SPIE
PublisherUnknown Publisher
Pages124 - 132
Number of pages9
Publication statusPublished - 2000

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