Original language | English |
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Title of host publication | Proc SPIE |
Publisher | Unknown Publisher |
Pages | 124 - 132 |
Number of pages | 9 |
Publication status | Published - 2000 |
Investigation of process latitude in e-beam lithography for positive CAR UVIII using novel volumetric linewidth measurement
V Kudryashov, P Prewett, A Michette
Research output: Chapter in Book/Report/Conference proceeding › Conference paper
1
Citation
(Scopus)