MACE silicon nanostructures

TY - CHAP

T1 - MACE silicon nanostructures

AU - Chiappini, Ciro

PY - 2018/7/4

Y1 - 2018/7/4

N2 - Metal-assisted chemical etching (MACE) of silicon continues to receive growing interest as a controllable method of generating silicon nanostructures of varied forms, including porous silicon. In this updated review, the various morphologies and etch chemistry variables (e.g., metal catalysts, substrate type, electrolyte temperature) are discussed in detail. A number of key papers regarding formation techniques and mechanisms are highlighted. Recent studies reveal a broad diverse range of potential applications for MACE-derived porous nanoparticles, nanowires, and nanoneedles chiefly in bioengineering, energy storage, and energy conversion.

AB - Metal-assisted chemical etching (MACE) of silicon continues to receive growing interest as a controllable method of generating silicon nanostructures of varied forms, including porous silicon. In this updated review, the various morphologies and etch chemistry variables (e.g., metal catalysts, substrate type, electrolyte temperature) are discussed in detail. A number of key papers regarding formation techniques and mechanisms are highlighted. Recent studies reveal a broad diverse range of potential applications for MACE-derived porous nanoparticles, nanowires, and nanoneedles chiefly in bioengineering, energy storage, and energy conversion.

KW - Metal assisted chemical etching

KW - Porous nanowires

KW - Porous particles

UR - https://www.scopus.com/pages/publications/85053985819

U2 - 10.1007/978-3-319-71381-6_17

DO - 10.1007/978-3-319-71381-6_17

M3 - Chapter

AN - SCOPUS:85053985819

SN - 9783319713793

VL - 1-2

SP - 247

EP - 267

BT - Handbook of Porous Silicon

PB - Springer International Publishing Switzerland

ER -