Nanomechanics of silicon surfaces with atomic force microscopy: An insight to the first stages of plastic deformation

TY - JOUR

T1 - Nanomechanics of silicon surfaces with atomic force microscopy

T2 - An insight to the first stages of plastic deformation

AU - Garcia-Manes, Sergi

AU - Guell, Aleix G

AU - Gorostiza, Pau

AU - Sanz, Fausto

PY - 2005/9/15

Y1 - 2005/9/15

N2 - The use of stiff cantilevers with diamond tips allows us to perform nanoindentations on hard covalent materials such as silicon with atomic force microscopy. Thanks to the high sensitivity in the force measurements together with the high resolution upon imaging the surface, we can study nanomechanical properties. At this scale, the surface deforms, following a simple non-Hertzian spring model. The plastic onset can be assessed from a discontinuity in the force-distance curves. Hardness measurements with penetration depths as small as 1 nm yield H = ∼ 25 GPa, thus showing a drastic increase with penetration depths below 5 nm.

AB - The use of stiff cantilevers with diamond tips allows us to perform nanoindentations on hard covalent materials such as silicon with atomic force microscopy. Thanks to the high sensitivity in the force measurements together with the high resolution upon imaging the surface, we can study nanomechanical properties. At this scale, the surface deforms, following a simple non-Hertzian spring model. The plastic onset can be assessed from a discontinuity in the force-distance curves. Hardness measurements with penetration depths as small as 1 nm yield H = ∼ 25 GPa, thus showing a drastic increase with penetration depths below 5 nm.

U2 - 10.1063/1.2035094

DO - 10.1063/1.2035094

M3 - Article

SN - 0021-9606

VL - 123

SP - N/A

JO - Journal of Chemical Physics

JF - Journal of Chemical Physics

IS - 11

M1 - 114711

ER -