Nanotribological properties of CN/TiCN/TiN/Si multilayer as determined by AFM

TY - JOUR

T1 - Nanotribological properties of CN/TiCN/TiN/Si multilayer as determined by AFM

AU - Morant, C

AU - Garcia-Manyes, S

AU - Sanz, F

AU - Sanz, J M

AU - Elizalde, E

PY - 2005/5

Y1 - 2005/5

N2 - In this work, the mechanical properties of new hard coatings based on a multilayer structure have been investigated at the nanometre scale. A multilayer structure of CN/TiCN/TiN on silicon substrate has been deposited by dual-ion-beam sputtering. The nanomechanical properties have been determined measuring nanoindentation, friction and wear by means of an atomic force microscope (AFM) on the multilayer after deposition of each layer. Nanoindentation and wear experiments were performed with the AFM using a diamond tip whereas the friction behaviour of each layer was evaluated taking AFM friction images with silicon nitride tips while the normal force was increased during the scanning.The hardness and the resistance to wear of the system are observed to increase as the next layer is deposited and the multilayer is completed. In contrast, the friction is shown to decrease in the same way. All these results indicate that the multilayer combines ultrahard behaviour with good tribological and wear properties.

AB - In this work, the mechanical properties of new hard coatings based on a multilayer structure have been investigated at the nanometre scale. A multilayer structure of CN/TiCN/TiN on silicon substrate has been deposited by dual-ion-beam sputtering. The nanomechanical properties have been determined measuring nanoindentation, friction and wear by means of an atomic force microscope (AFM) on the multilayer after deposition of each layer. Nanoindentation and wear experiments were performed with the AFM using a diamond tip whereas the friction behaviour of each layer was evaluated taking AFM friction images with silicon nitride tips while the normal force was increased during the scanning.The hardness and the resistance to wear of the system are observed to increase as the next layer is deposited and the multilayer is completed. In contrast, the friction is shown to decrease in the same way. All these results indicate that the multilayer combines ultrahard behaviour with good tribological and wear properties.

U2 - 10.1088/0957-4484/16/5/014

DO - 10.1088/0957-4484/16/5/014

M3 - Article

SN - 0957-4484

VL - 16

SP - S211-S217

JO - NANOTECHNOLOGY

JF - NANOTECHNOLOGY

IS - 5

ER -